
RTP-DTS-8 automatic double-chamber Rapid Thermal Processing is a fully automatic vertical rapid annealing system in protective atmosphere, which uses infrared visible light to heat monolithic Wafer or samples with short process time and high temperature control precision. It is suitable for 6-inch and 8-inch Rapid Thermal Processing process.

RTP-Table-6 desktop Rapid Thermal Processing is a desktop rapid annealing system in protective atmosphere, which is heated by infrared halogen lamp to accurately control the temperature, ensuring good reproducibility and temperature uniformity, suitable for 6-inch rapid annealing process.


Máy làm sạch plasma chân không SDV-D16L1 được thiết kế cho mẫu thử với số lượng ít, dưới tác động của điện trường cao áp, khí công nghệ bị điện ly tạo thành plasma, thực hiện làm sạch và cải biến bề mặt. Thiết bị di chuyển tiện lợi, cấu hình đa dạng, vận hành dễ dàng và ổn định.


Before the flocking and coating process in the automotive interior trim process, surface treatment by Shengding vacuum plasma can effectively improve the surface activity of PP and other materials, make it easier to combine with the coating material, thereby improving the firmness and durability of the coating.

The online chip vacuum plasma cleaner is mainly used to clean surface pollutants of lead frame surface products in the semiconductor industry, improve surface activity and enhance adhesion performance.

Fast reaction speed and short reaction time

The processing temperature is low and can maintain the plasma under high pressure


3 μ 97% clearance rate of m dust particles, 6 μ 98% clearance rate of m dust particles

Suitable for surface cleaning and activation of various small areas, high precision processing trajectories, and multi material edges and corners, paired with a jet direct spray gun head