RTP-DTS-8 automatic double-chamber Rapid Thermal Processing is a fully automatic vertical rapid annealing system in protective atmosphere, which uses infrared visible light to heat monolithic Wafer or samples with short process time and high temperature control precision. It is suitable for 6-inch and 8-inch Rapid Thermal Processing process.
RTP-Table-6 desktop Rapid Thermal Processing is a desktop rapid annealing system in protective atmosphere, which is heated by infrared halogen lamp to accurately control the temperature, ensuring good reproducibility and temperature uniformity, suitable for 6-inch rapid annealing process.
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